[IEEE 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Bangkok, Thailand (2007.01.16-2007.01.19)] 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - The Preparation of Self-formed PDMS Nanostructures by RIE Etching
Chen, Ming-Hung, Hsu, Tsung-Hsing, Chuang, Yun-Ju, Chen, Po-Hung, Tseng, Fan-GangYear:
2007
Language:
english
DOI:
10.1109/nems.2007.352181
File:
PDF, 3.60 MB
english, 2007