In-situ characterization of aqueous-based...

In-situ characterization of aqueous-based hafnium oxide hydroxide sulfate thin films

Flynn, Brendan, Kim, Daeho, Clark, Benjamin L., Telecky, Alan, Arnadottir, Liney, Szanyi, Janos, Keszler, Douglas A., Herman, Gregory S.
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Volume:
46
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5205
Date:
April, 2014
File:
PDF, 282 KB
english, 2014
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