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Effect of in situ hydrogen plasma treatment on zinc oxide grown using low temperature atomic layer deposition
Jung, Tae-Hoon, Park, Jin-Seong, Kim, Dong-Ho, Jeong, Yongsoo, Park, Sung-Gyu, Kwon, Jung-DaeVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4767813
File:
PDF, 1.07 MB
english, 2013