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[IEEE 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 - Boston, MA, USA (30 April-2 May 2002)] 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259) - Characterization of copper voids in dual damascene processes
Guldi, R.L., Shaw, J.B., Ritchison, J., Oestreich, S., Davis, K., Fiordalice, R.Year:
2002
Language:
english
DOI:
10.1109/asmc.2002.1001632
File:
PDF, 555 KB
english, 2002