Defect profiling of semiconductor epilayers using positron beams
Tandberg, Erik, Schultz, Peter J., Aers, Geof C., Jackman, T. E.Volume:
67
Language:
english
Journal:
Canadian Journal of Physics
DOI:
10.1139/p89-048
Date:
April, 1989
File:
PDF, 519 KB
english, 1989