Atomic layer deposition of ZrO 2 for graphene-based multilayer structures: In situ and ex situ characterization of growth process
Tamm, Aile, Kozlova, Jekaterina, Aarik, Lauri, Aidla, Aleks, Lu, Jun, Kiisler, Alma-Asta, Kasikov, Aarne, Ritslaid, Peeter, Mändar, Hugo, Hultman, Lars, Sammelselg, Väino, Kukli, Kaupo, Aarik, JaanVolume:
211
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201330106
Date:
February, 2014
File:
PDF, 721 KB
english, 2014