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Dopant delineation on Si(100) using anodic oxidation and atomic force microscopy
J. A. Bardwell, E. M. Allegretto, B. Mason, L. E. Erickson, H. G. ChampionYear:
1996
Language:
english
DOI:
10.1063/1.116342
File:
PDF, 861 KB
english, 1996