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[IEEE 2002 IEEE/LEOS International Conference on Optical MEMS - Lugano, Switzerland (20-23 Aug. 2002)] IEEE/LEOS International Conference on Optical MEMs - Comparative study of electrostatically actuated torsion micromirrors: design parameters and performance
Bochobza-Degani, O., Feldman, S., Nemirovsky, Y.Year:
2002
Language:
english
DOI:
10.1109/omems.2002.1031458
File:
PDF, 225 KB
english, 2002