[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Stackable short flow Characterization Vehicle test chip to reduce test chip designs, mask cost and engineering wafers
Hess, Christopher, Inani, Anand, Joag, Amit, Zhao, Sa, Spinelli, Mark, Zaragoza, Michael, Nguyen, Long, Kumar, BinodYear:
2010
Language:
english
DOI:
10.1109/asmc.2010.5551474
File:
PDF, 459 KB
english, 2010