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Direct patterning of nanometer-scale silicide structures on silicon by ion-beam implantation through a thin barrier layer
M. M. Mitan, D. P. Pivin, T. L. Alford, J. W. MayerYear:
2001
Language:
english
DOI:
10.1063/1.1369608
File:
PDF, 382 KB
english, 2001