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Systematic Study of Surface Chemistry and Comprehensive Two-Dimensional Tertiary Current Distribution Model for Copper Electrochemical Deposition
Kim, Gwang-Soo, Merchant, Tushar, D’Urso, John, Gochberg, Lawrence A., Jensen, Klavs F.Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2337767
File:
PDF, 634 KB
english, 2006