Design and application of multiwafer MOCVD systems for...

Integrated Ferroelectrics 1998 / 09 Vol. 21; Iss. 1-4

Design and application of multiwafer MOCVD systems for ferroelectrics

Deschler, M., Schumacher, M., Woelk, E., Schmitz, D., Strauch, G., Heuken, M., Juergensen, H.
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Volume:
21
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589808202078
Date:
September, 1998
File:
PDF, 329 KB
english, 1998
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