[IEEE 1996 International Semiconductor Conference. 19th...

[IEEE 1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings - Sinaia, Romania (9-12 Oct. 1996)] 1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings - Zn/sup +//P/sup +/ and Zn/sup +//As/sup +/ co-implantation in InP single crystals

Ursaki, V.V., Tiginyanu, I.M., Ichizli, V.M., Terletsky, A.I., Pyshnaya, N.B., Radautsan, S.I.

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Volume:

Year:

1996

Language:

english

DOI:

10.1109/smicnd.1996.557405

File:

PDF, 351 KB

english, 1996

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