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Diffractive Optics and Optical Microsystems || Fabrication of Diffractive Optical Elements by Electron Beam Lithography
Martellucci, S., Chester, A. N.Volume:
10.1007/97
Year:
1997
Language:
english
DOI:
10.1007/978-1-4899-1474-3_14
File:
PDF, 1.39 MB
english, 1997