Diffractive Optics and Optical Microsystems || Fabrication...

Diffractive Optics and Optical Microsystems || Fabrication of Diffractive Optical Elements by Electron Beam Lithography

Martellucci, S., Chester, A. N.

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Volume:

10.1007/97

Year:

1997

Language:

english

DOI:

10.1007/978-1-4899-1474-3_14

File:

PDF, 1.39 MB

english, 1997

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