Design and fabrication of MEMS logic gates

Journal of Micromechanics and Microengineering 2008 / 04 Vol. 18; Iss. 4

Design and fabrication of MEMS logic gates

Tsai, Chun-Yin, Kuo, Wei-Ting, Lin, Chi-Bao, Chen, Tsung-Lin
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/4/045001
Date:
April, 2008
File:
PDF, 1.78 MB
english, 2008
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