![](/img/cover-not-exists.png)
[IEEE 2012 International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM) - Smolenice, Slovakia (2012.11.11-2012.11.15)] The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems - Properties of Al2O3 thin films grown by atomic layer deposition
Frohlich, K., Micusik, M., Dobrocka, E., Siffalovic, P., Gucmann, F., Fedor, J.Year:
2012
Language:
english
DOI:
10.1109/asdam.2012.6418575
File:
PDF, 121 KB
english, 2012