Fabrication of Crystalline Si Waveguides on (1 0 0) Bulk Si Substrate Using Laser Reformation Method
Hung, Shih-Che, Lin, Shih-Jieh, Chao, Jiun-Jie, Lin, Ching-FuhVolume:
31
Language:
english
Journal:
Journal of Lightwave Technology
DOI:
10.1109/jlt.2013.2283216
Date:
November, 2013
File:
PDF, 538 KB
english, 2013