[IEEE 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Suzhou, China (2013.08.26-2013.08.30)] 2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale - A novel micro-nano measurement method for line width using confocal microscopy with super-resolution image restoration
Liu, Dali, Qiu, Lirong, Zhao, WeiqianYear:
2013
Language:
english
DOI:
10.1109/3m-nano.2013.6737451
File:
PDF, 269 KB
english, 2013