[IEEE Eleventh IEEE/CHMT International Electronics Manufacturing Technology Symposium - San Francisco, CA, USA (16-18 Sept. 1991)] [1991 Proceedings] Eleventh IEEE/CHMT International Electronics Manufacturing Technology Symposium - The key sputter deposition step in TAB wafer bump processing: optimizing TiW adhesion and diffusion barrier properties
Traut, J.Year:
1991
Language:
english
DOI:
10.1109/iemt.1991.279736
File:
PDF, 414 KB
english, 1991