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[IEEE IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (7-11 July 2003)] Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003 - Physical Failure Analysis techniques for Cu/low k technology
Huixian Wu,, Hooghan, B., Cargo, J.Year:
2003
Language:
english
DOI:
10.1109/ipfa.2003.1222763
File:
PDF, 623 KB
english, 2003