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Kinetics of Si incorporation into a Ge matrix for Si[sub 1−x]Ge[sub x] layers grown by chemical vapor deposition
Tomasini, P., Bauer, M., Cody, N., Arena, C.Volume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2183427
File:
PDF, 345 KB
english, 2006