Discharge characteristics for magnetron sputtering of Al in...

Discharge characteristics for magnetron sputtering of Al in Ar and Ar/O2 mixtures

Maniv, S.
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Volume:
17
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.570553
Date:
May, 1980
File:
PDF, 1.49 MB
english, 1980
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