![](/img/cover-not-exists.png)
Discharge characteristics for magnetron sputtering of Al in Ar and Ar/O2 mixtures
Maniv, S.Volume:
17
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.570553
Date:
May, 1980
File:
PDF, 1.49 MB
english, 1980