[IEEE 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1994)] Proceedings of 1994 IEEE International Electron Devices Meeting - Reliability characteristics and surface preparation technique for ultra-thin (33 Å-87 Å) oxides and oxynitrides
Ming-Yin Hao,, Kafai Lai,, Wei-Ming Chen,, Lee, J.C.Year:
1994
Language:
english
DOI:
10.1109/iedm.1994.383338
File:
PDF, 398 KB
english, 1994