Bakable aluminium vacuum chamber and bellows with an...

Bakable aluminium vacuum chamber and bellows with an aluminum flange and metal seal for ultrahigh vacuum

Ishimaru, Hajime
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Volume:
15
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.569853
Date:
November, 1978
File:
PDF, 413 KB
english, 1978
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