Shape and correlation of oxygen precipitates in silicon

Shape and correlation of oxygen precipitates in silicon

D. Sieger, H. Tietze-Jaensch, R. Geick, W. Zulehner, A. de Geyer
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Volume:
180-181
Year:
1992
Language:
english
Pages:
3
DOI:
10.1016/0921-4526(92)90808-6
File:
PDF, 263 KB
english, 1992
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