[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Novel room-temperature wafer-to-wafer attachment and sealing of cavities using cold metal welding
Adit Decharat,, Boers, Marc, Niklaus, Frank, Stemme, GoranYear:
2007
Language:
english
DOI:
10.1109/memsys.2007.4433148
File:
PDF, 1.14 MB
english, 2007