Interaction of hydrogen plasmas with hydrocarbon films,...

Interaction of hydrogen plasmas with hydrocarbon films, investigated by infrared spectroscopy using an optical cavity substrate

von Keudell, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
15
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.580498
Date:
March, 1997
File:
PDF, 403 KB
english, 1997
Conversion to is in progress
Conversion to is failed