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Mechanical properties and residual stress in AlN/Al mixed films prepared by ion-beam-assisted deposition
Watanabe, Yoshihisa, Uchiyama, Shingo, Nakamura, Yoshikazu, Li, Chunlang, Sekino, Tohru, Niihara, KoichiVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582034
File:
PDF, 383 KB
english, 1999