Morphology-dependent oxidation behavior of reactively...

Morphology-dependent oxidation behavior of reactively sputtered titanium–nitride films

Hinode, Kenji
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Volume:
15
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.580673
Date:
July, 1997
File:
PDF, 697 KB
english, 1997
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