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Argon and oxygen sputter etching of polystyrene, polypropylene, and poly(ethylene terephthalate) thin films
Grant, J. L.Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575013
Date:
July, 1988
File:
PDF, 848 KB
english, 1988