Low-temperature selective-area deposition of metals:...

Applied Physics Letters 1993 Vol. 62; Iss. 13

Low-temperature selective-area deposition of metals: Chemical vapor deposition of gold from ethyl(trimethylphosphine)gold(I)

Banaszak Holl, M. M., Seidler, P. F., Kowalczyk, S. P., McFeely, F. R.
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Volume:
62
Year:
1993
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.108663
File:
PDF, 587 KB
english, 1993
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