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Influence of substrate temperature and bias voltage on properties of chromium nitride thin films deposited by cylindrical cathodic arc deposition
Valleti, Krishna, Jyothirmayi, A., Ramakrishna, M., Joshi, S. V.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3625234
File:
PDF, 2.47 MB
english, 2011