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Comparison of recrystallization, atomic redistribution and F 1s NEXAFS of fluorine in Silicon
W. Frentrup, A. MertensVolume:
208-209
Year:
1995
Language:
english
Pages:
2
DOI:
10.1016/0921-4526(94)00855-p
File:
PDF, 132 KB
english, 1995