Molecular-dynamics model of energetic fluorocarbon-ion...

Journal of Applied Physics 2005 Vol. 97; Iss. 9

Molecular-dynamics model of energetic fluorocarbon-ion bombardment on SiO[sub 2] I. Basic model and CF[sub 2][sup +]-ion etch characterization

Smirnov, V. V., Stengach, A. V., Gaynullin, K. G., Pavlovsky, V. A., Rauf, S., Stout, P. J., Ventzek, P. L. G.
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Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1893205
File:
PDF, 733 KB
english, 2005
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