A new maskless selective-growth process for InP on (100) Si

Tang, G.-P., Peiner, E., Wehmann, H.-H., Lubnow, A., Zwinge, G., Schlachetzki, A., Hergeth, J.

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Volume:

Year:

1992

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.352201

File:

PDF, 638 KB

english, 1992

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