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TEM Atomic Force Microscopy
Nafari, A., Karlen, D., Rusu, C., Svensson, K., Olin, H., Enoksson, P.Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2007.912714
Date:
April, 2008
File:
PDF, 665 KB
english, 2008