Ion dynamics model for collisionless radio frequency...

Ion dynamics model for collisionless radio frequency sheaths

Bose, Deepak, Govindan, T. R., Meyyappan, M.
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Volume:
87
Year:
2000
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.372966
File:
PDF, 386 KB
english, 2000
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