Thermal behavior of hafnium-based ultrathin films on...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2003 Vol. 21; Iss. 4

Thermal behavior of hafnium-based ultrathin films on silicon

Pezzi, R. P., Morais, J., Dahmen, S. R., Bastos, K. P., Miotti, L., Soares, G. V., Baumvol, I. J. R., Freire, F. L.
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Volume:
21
Year:
2003
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1575218
File:
PDF, 392 KB
english, 2003
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