Structural optimization of Z-axis tuning-fork MEMS...

Microsystem Technologies 2015 / 6 Vol. 21; Iss. 6

Structural optimization of Z-axis tuning-fork MEMS gyroscopes for enhancing reliability and resolution

Zhang, Lihong, Masek, Vlastimil, Sanatdoost, Nikoo Naeemi
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Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2280-y
Date:
June, 2015
File:
PDF, 2.28 MB
english, 2015
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