A novel approach for MEMS with galvanic protection on SOI wafer
Wei, Wenshan, You, Weilong, Zhao, Wei, Yu, Zhengyin, Pang, Jun, Yang, HengVolume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2312-7
Date:
September, 2015
File:
PDF, 1.12 MB
english, 2015