Electrical properties of ZrO[sub 2] gate dielectric on SiGe

Ngai, T., Qi, W. J., Sharma, R., Fretwell, J., Chen, X., Lee, J. C., Banerjee, S.

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Volume:

Year:

2000

Language:

english

Journal:

Applied Physics Letters

DOI:

10.1063/1.125801

File:

PDF, 296 KB

english, 2000

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