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[IEEE 2000 International Semiconducting and Insulating Materials Conference. SIMC-XI - Canberra, ACT, Australia (3-7 July 2000)] 2000 International Semiconducting and Insulating Materials Conference. SIMC-XI (Cat. No.00CH37046) - Ion implantation into GaN: opportunities and problems
Kucheyev, S.O., Williams, J.S., Jagadish, C., Zou, J., Toth, M., Phillips, M.R., Li, G.Year:
2000
Language:
english
DOI:
10.1109/sim.2000.939195
File:
PDF, 310 KB
english, 2000