Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1990 / 7 Vol. 8; Iss. 4
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A review of simplified photolithographic techniques for image transfer in planarized very large scale integrated circuits technology
Frieser, R. G.Volume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.584989
Date:
July, 1990
File:
PDF, 881 KB
english, 1990