A review of simplified photolithographic techniques for...

A review of simplified photolithographic techniques for image transfer in planarized very large scale integrated circuits technology

Frieser, R. G.
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Volume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.584989
Date:
July, 1990
File:
PDF, 881 KB
english, 1990
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