Formation of silicon islands on a silicon on insulator substrate upon thermal annealing
Legrand, B., Agache, V., Nys, J. P., Senez, V., Stievenard, D.Volume:
76
Year:
2000
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.126603
File:
PDF, 407 KB
english, 2000