![](/img/cover-not-exists.png)
[IEEE European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet - Villard de Lans, France (1997.03.16-1997.03.19)] European Workshop Materials for Advanced Metallization, - Stress in copper films for interconnects
Riedel, S., Rober, J., Schulz, S.E., Gebner, T.Year:
1998
Language:
english
DOI:
10.1109/mam.1998.887551
File:
PDF, 101 KB
english, 1998