Fabrication and characterization of MEMS piezoelectric...

Microsystem Technologies 2015 / 5 Vol. 21; Iss. 5

Fabrication and characterization of MEMS piezoelectric synthetic jet actuators with bulk-micromachined PZT thick film

Wang, Shushan, Ma, Binghe, Deng, Jinjun, Qu, Hongdong, Luo, Jian
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Volume:
21
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2278-5
Date:
May, 2015
File:
PDF, 1.53 MB
english, 2015
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