Al-O interactions in ion-implanted crystalline silicon
Galvagno, G., La Ferla, A., Spinella, C., Priolo, F., Raineri, V., Torrisi, Lucio, Rimini, E., Carnera, A., Gasparotto, A.Volume:
76
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.357616
File:
PDF, 1.22 MB
english, 1994