rf-induction plasma apparatus for generating submicron...

Review of Scientific Instruments 1989 Vol. 60; Iss. 7

rf-induction plasma apparatus for generating submicron particles of metals

Barmore, W. L., Hrubesh, L. W., Keene, L. E., Raymond, E. L.
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Volume:
60
Year:
1989
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1140986
File:
PDF, 821 KB
english, 1989
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