Plasma deposition of low-stress electret films for electroacoustic and solar cell applications
Klemberg-Sapieha, J. E.Volume:
14
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.580199
Date:
September, 1996
File:
PDF, 385 KB
english, 1996