[IEEE 2004 International Semiconductor Conference. CAS 2004 - Sinaia, Romania (4-6 Oct. 2004)] 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748) - SiC/Si and AlN/Si heterostructures for microelectromechanical RF sensors
Foerster, C., Cimalla, V., Lebedev, V., Cengher, D., Ambacher, O., Brueckner, K., Stephan, R., Hein, M.A.Volume:
2
Year:
2004
Language:
english
DOI:
10.1109/smicnd.2004.1403020
File:
PDF, 338 KB
english, 2004